VASE Ellipsometer

VASE(Variable angle spectroscopic ellipsometer) is the most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals and multi-layers. Spectroscopic ellipsometry involves the measurement of the change in the polarization state of light as a function of wavelength and analysis of ellipsometric data is used to determine the film thickness and optical constants of the materials. WVASE32® software package provides easy calibration, data acquisition, and analysis for all different applications.

Spectral Range – 193nm to 2700nm; Reflection and Transmission Ellipsometry; Generalized Ellipsometry

The angle of Incidence: 15 o to 90 o

Please use the Facility Online Manager for instrument signup.