Rapid Thermal Processing

The Heatpulse 610 is a rapid thermal annealing system capable of heating a sample to temperatures as high as 1100°C in a very short time. The system can ramp up rapidly (up to 50 C/s) and the process periods are typically 1-600 seconds.  The Heatpulse system uses a set of high-intensity lamps that surround a quartz isolation tube to heat the sample. The system has closed-loop temperature control with thermocouple (TC) temperature sensing Currently, the process gases available for use are Argon and Forming Gas (5% Hydrogen with Nitrogen balance).

Reserve Equipment